Clean BN-Encapsulated 2D FETs with Lithography-Compatible Contacts

Binxi Liang,Anjian Wang,Jian Zhou,Shihao Ju,Jian Chen,Kenji Watanabe,Takashi Taniguchi,Yi Shi,Songlin Li
DOI: https://doi.org/10.1021/acsami.2c02956
2022-04-18
Abstract:Device passivation through ultraclean hexagonal BN encapsulation has proven to be one of the most effective ways of constructing high-quality devices with atomically thin semiconductors that preserve the ultraclean interface quality and intrinsic charge transport behavior. However, it remains challenging to integrate lithography-compatible contact electrodes with flexible distributions and patterns. Here, we report the feasibility of a straightforward integration of lithography-defined contacts into BN-encapsulated two-dimensional field-effect transistors (2D FETs), giving rise to overall device quality comparable to the state-of-the-art results from the painstaking pure dry transfer processing. The electronic characterization of FETs consisting of WSe<sub>2</sub> and MoS<sub>2</sub> channels reveals an extremely low scanning hysteresis of ∼2 mV on average, a low density of interfacial charged impurities of ∼10<sup>11</sup> cm<sup>-2</sup>, and generally high charge mobilities over 1000 cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup> at low temperatures. The overall high device qualities verify the viability of directly integrating lithography-defined contacts into BN-encapsulated devices to exploit their intrinsic charge transport properties for advanced electronics.
materials science, multidisciplinary,nanoscience & nanotechnology
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