Abstract:Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi beam lithography method to fabricate photonic crystal with nanoscale structure without cracking. Using multi-beam ultrafast laser processing and etching, parallel channels with subwavelength gap are obtained in yttrium aluminum garnet crystal. Combining optical simulation based on Debye diffraction, we experimentally show the gap width of parallel channels can be controlled at nanoscale by changing phase holograms. With the superimposed phase hologram designing, functional structures of complicated channel arrays distribution can be created in crystal. Optical gratings of different periods are fabricated, which can diffract incident light in particular ways. This approach can efficiently manufacture nanostructures with controllable gap, and offer an alternative to the fabrication of complex photonic crystal for integrated photonics applications.

Multichannel Routing of Diffraction-Inhibited Beams in Two-Dimensional Photonic Crystals

Tunable Beam Propagating Characteristics of Two-Dimensional Rectangular-Rod Photonic Crystals Based on Self-Collimation Effect

Diffraction Inhibition in Two-Dimensional Photonic Crystals

Ultracompact multiway beam splitters using multiple coupled photonic crystal waveguides

Multi-channel Unidirectional and Bidirectional Wavelength Filters in Two Dimensional Photonic Crystals

Wide-range and Tunable Diffraction Management Using 2D Rectangular Lattice Photonic Crystals

Dispersion-Based Optical Routing In Photonic Crystals

Design of A Compact Polarizing Beam Splitter Based on A Photonic Crystal Ring Resonator with A Triangular Lattice

Engineering Dispersion Properties of Photonic Crystals for Spatial Beam Routing and Non-Channel Waveguiding

Y-Shaped Beam Splitters for Self-Collimated Beams in 2d Photonic Crystals

Dispersion-based Applications in Photonic Crystals

On-Chip Diffraction-Free Beam Guiding Beyond the Light Cone

Study of the multi-channel filtering and beam splitting characters of two-dimensional photonic crystal based on the rectangular defects

Tunable Diffraction-Free Array In Nonlinear Photonic Crystal

Dispersion-based beam splitter in photonic crystals.

A Novel Optical Beam Splitter Based on Photonic Crystal with Hybrid Lattices

Optical Switches and Logic Gates Based on Self-Collimated Beams in Two-Dimensional Photonic Crystals

Controlling directional propagation in driven-dissipative 2D photonic lattices

Unidirectional Light Beam Splitter Based on the Square-Lattice Photonic Crystal Heterojunctions

Multi-optical Effects in Two-Dimensional Photonic Crystals of Metallic Pairs

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser