Abstract:The incident angles of the optical systems with high numerical apertures, such as lithography or microscope, are larger than those of normal ones. For these systems, polarized illumination is widely adopted. The coatings on their surfaces will make s and p polarization components of oblique incident light experience diverse amplitudes and phase modulations, and induce extra polarization aberrations. We apply the vectorial diffraction theory to assess the effects of coating-induced polarization aberrations on the focusing properties of these systems. By applying the generalized Debye integral, the relationship between the parameters of coating and electric field vector near the focal spot is established. Considering x linearly polarized light as the incident light field, we evaluate the potential influence of the coatings on the intensity and the full width at half maxium of focal spots. In the further discussion, we compare the results of different coatings when the various optimization goals are set, and certify that the phase difference caused by coating has more effect on focusing property. Based on this, the additional constraint conditions of coating design are proposed to suppress such disturbance, i.e. to properly increase relative weight of phase constraint conditions. With this proposed constraint conditions, we design and optimize an anti-reflection coating with low polarization aberrations. By applying this designing, the central intensity of focal spot can be enhanced by 12.5%, and the light energy utilization will be improved effectively.

Influence of the higher-orders of diffraction on the pattern evolution for tightly focused beams.

Formation of Sub-Half-Wavelength Focal Spot with Ultra Long Depth of Focus

Focusing properties of cylindrical vector vortex beams with high numerical aperture objective

Focus shaping of Bessel-Gauss beam with radial varying polarization

Generation of propagation-invariant and intensity-controlled dark hollow beams by a refractive beam shaping system.

Analytical Description of Sub-Diffraction Dark Spot

Propagation Dynamics Of Abruptly Autofocusing Airy Beams With Optical Vortices

High-Order Bessel-Gaussian Beam and Its Propagation Properties

Radiation force of coherent and partially coherent flat-topped beams on a Rayleigh particle.

High-order diffraction for optical superfocusing

Optimizing Focus: Switchable Modes and Sub-Diffraction Spots in Inverse Circular Airy Beams

Propagation characteristics of the modified circular Airy beam.

Manipulation of Abruptly Autofocusing Property of Circular Airy Beam Carrying Hard-Edge Annular Aperture

Interactive Dynamics of Two Copropagating Laser Beams in Underdense Plasmas.

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Propagation properties and radiation forces of partially coherent self-shifting cosine-Gaussian beams

Simulation of Three-Wave Interactions for Focused Beams with an Assistant Curvilinear Coordinate System

Optical Manipulation Using Highly Focused Alternate Radially and Azimuthally Polarized Beams Modulated by a Devil's Lens.

Effect of Coating-Induced Polarization Aberrations on the Focusing Properties in High Numerical Aperture Optical System

Modeling the focusing of a radially-polarized laser beam with an initially flat-top intensity profile

Focal shift of flat-topped beams passing through a lens system with or without aperture