Ferroelectric Thin Film Diaphragm Resonators for Bio-Detection

Shaokang Li,Wei Ren,Xu Lu,Zhuo Xu,Zhongyang Cheng,Xiaofeng Chen,Peng Shi,Xiaoqing Wu,Xi Yao
DOI: https://doi.org/10.1080/00150193.2010.492743
2010-01-01
Ferroelectrics
Abstract:In this paper, we have investigated a piezoelectric resonator biosensor based on ferroelectric thin film diaphragm. The diaphragm structure utilizing a flexural vibration mode has been adopted to replace the microcantilever structure in a biosensor. It is an acoustic wave device which can be immobilized with a bio-molecular recognition layer on its surface. Like a microcantilever sensor, the resonance frequency of the diaphragm sensor shifts when the bio-molecular recognition layer reacts with the target species. But a diaphragm sensor has more robust structure comparing with a microcantilever sensor. The responses of the diaphragm biosensor have been simulated using a commercial FEM software package, ANSYS. The prototype devices were fabricated by a conventional method and a MEMS process, respectively. The performance of the sensor was tested and reported.
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