Metamaterial via Reconfi guration of Asymmetric Split-Ring Resonators
Y. Fu,A. Liu,W. Zhu,X. M. Zhang,D. Tsai,J. Zhang,T. Mei,J. Tao,H. Guo,X. H. Zhang,J. Teng,N. Zheludev,G. Lo
2011-01-01
Abstract:A micromachined reconfi gurable metamaterial is presented, whose unit cell consists of a pair of asymmetric split-ring resonators (ASRRs); one is fi xed to the substrate while the other is patterned on a movable frame. The reconfi gurable metamaterial and the supporting structures (e.g., microactuators, anchors, supporting frames, etc.) are fabricated on a silicon-on-insulator wafer using deep reactive-ion etching (DRIE). By adjusting the distance between the two ASRRs, the strength of dipole–dipole coupling can be tuned continuously using the micromachined actuators and this enables tailoring of the electromagnetic response. The reconfi guration of unit cells endows the micromachined reconfi gurable metamaterials with unique merits such as electromagnetic response under normal incidence and wide tuning of resonant frequency (measured as 31% and 22% for transverse electric polarization and transverse magnetic polarization, respectively). The reconfi guration could also allow switching between the polarization-dependent and polarization-independent states. With these features, the micromachined reconfi gurable metamaterials may fi nd potential applications in transformation optics devices, sensors, intelligent detectors, tunable frequency-selective surfaces, and spectral fi lters.