Bayesian Statistical Monitoring of Complex Semiconductor Manufacturing Batch Processes

Zhiqiang Ge,Junhua Zheng,Zhihuan Song,Huaping Dai
DOI: https://doi.org/10.3182/20110828-6-it-1002.00126
2011-01-01
IFAC Proceedings Volumes
Abstract:Most current batch process monitoring methods have been implemented under a single operation mode, thus the batch uncertainty is assumed to be caused by batch-to-batch variations. However, due to the change of market requirements, the batch operation mode should also be changed frequently, especially in the semiconductor manufacturing process. This paper proposes an efficient method for monitoring those batch processes. First, the data is partitioned into multiple clusters, which correspond to different operation modes. Second, a sub-statistical model is built for each operation mode. Then the Bayesian inference strategy is introduced for result combination in different operation modes. The monitoring performance of the proposed method is evaluated by a real semiconductor process application case study.
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