Fabrication of a 1024 × 1024 Format Long Wavelength Infrared Focal Plane Array Based on Type-Ii Superlattice and Barrier Enhanced Structure
Fangfang Wang,Zhicheng Xu,Zhizhong Bai,Hui Li,Yi Zhou,Jianxin Chen,Li He
DOI: https://doi.org/10.1016/j.infrared.2021.103700
IF: 2.997
2021-01-01
Infrared Physics & Technology
Abstract:1024 x 1024 format long-wavelength infrared focal plane arrays are realized using type-II superlattice material with a double-barrier enhanced structure grown on 3 '' GaSb substrate. The detector structure material exhibits excellent crystalline quality and uniformity. A 100% cutoff wavelength of -11.8 pm was obtained at 82 K. A dark current density of 1.4 x 10-6 A/cm2 and a differential resistance-area product RA of 4.7 x 104 omega cm2 at 49 K, 3.6 x 10-5 A/cm2 and 2.8 x 103 omega cm2 at 70 K, and 2.5 x 10-4 A/cm2 and 5.5 x 102 omega cm2 at 82 K, at a reverse bias of - 50 mV, were obtained, respectively. At zero bias, the R0A was 5.1 x 104 omega cm2, 290.6 omega cm2, and 35.6 omega cm2 at 49 K, 70 K, and 82 K, respectively. Noise equivalent temperature differences of 37.4 mK at 82 K and 31.9 mK at 70 K were achieved with an integration time of 0.12 ms, a 300 K background and f/2.0 optics. The large format FPA also shows excellent imaging.