Abstract:Numerous applications in neuroscience research and neural prosthetics, such as electrocorticogram (ECoG) recording and retinal prosthesis, involve electrical interactions with soft excitable tissues using a surface recording and/or stimulation approach. These applications require an interface that is capable of setting up high-throughput communications between the electrical circuit and the excitable tissue and that can dynamically conform to the shape of the soft tissue. Being a compliant material with mechanical impedance close to that of soft tissues, polydimethylsiloxane (PDMS) offers excellent potential as a substrate material for such neural interfaces. This paper describes an integrated technology for fabrication of PDMS-based stretchable microelectrode arrays (MEAs). Specifically, as an integral part of the fabrication process, a stretchable MEA is directly fabricated with a rigid substrate, such as a thin printed circuit board (PCB), through an innovative bonding technology-via-bonding-for integrated packaging. This integrated strategy overcomes the conventional challenge of high-density packaging for this type of stretchable electronics. Combined with a high-density interconnect technology developed previously, this stretchable MEA technology facilitates a high-resolution, high-density integrated system solution for neural and muscular surface interfacing. In this paper, this PDMS-based integrated stretchable MEA (isMEA) technology is demonstrated by an example design that packages a stretchable MEA with a small PCB. The resulting isMEA is assessed for its biocompatibility, surface conformability, electrode impedance spectrum, and capability to record muscle fiber activity when applied epimysially.

Research on fabrication of multi-electrode arrays by direct laser technology

Fabrication of multi-electrode array system by micropen-laser hybrid direct writing technology

[The Research on High-Density Flexible Microelectrode Array of Retinal Prosthesis Based on MEMS Technology].

Fabrication of Flexible 3D Microelectrode Aray with Parylene-Based Pattern Transfer Technique

Fabrication of Parylene-Based Flexible Microelectrode Arrays

Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis

A novel 3D flexible parylene-metal structure fabrication technique

Microelectrode array for bioelectrical signal stimulation and recording

Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

Development of the three dimensional multi-electrode array for neural recording

Key Design of Flexible Neural Microelectrode Arrays and Its Microfabrication Process

Silicon-based Microelectrode Arrays for Stimulation and Signal Recording of in Vitro Cultured Neurons

A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues

Trends and recent development of the microelectrode arrays (MEAs)

Laser Sharpening of Carbon Fiber Microelectrode Arrays for Brain Recording

Flexible Microelectrode Arrays Based on Vacuum Filling for Electrophysiology Sensing of Cardiomyocytes

ANODIC-BONDING-ASSISTED SILICON MICROELECTRODE ARRAY FOR NEURAL APPLICATIONS

Laser direct micromilling of copper-based bioelectrode with surface microstructure array

PDMS-Based Neural Microelectrode Arrays for Retinal Prosthesis

[The research on multi-layer flexible microelectrode arrays of epiretinal prosthesis].

A PDMS-based integrated stretchable microelectrode array (isMEA) for neural and muscular surface interfacing.