Influence of Sb Doping on Optical and Structural Properties of Zno by Mocvd

Jianze Zhao,Hongwei Liang,Jingchang Sun,Qiuju Feng,Shuoshi Li,Jiming Bian,Lizhong Hu,Guotong Du,Jingjian Ren,Jianlin Liu
DOI: https://doi.org/10.1002/pssa.201026659
2011-01-01
Abstract:Sb-doped zinc oxide (ZnO) films grown by metal organic chemical vapor deposition (MOCVD) were investigated. The influence of Sb-doping concentration on the optical and structural properties of ZnO was investigated. The deep-level emission was suppressed gradually by Sb doping. The grain size of ZnO was also increased by Sb doping. The reasons for improvement in optical and structural properties of ZnO thin films are also discussed. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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