Advances in Fabrication and Application of Black Silicon

Zenan SHEN,Bangwu LIU,Yang XIA,Jie LIU,Chaobo LI,Bo CHEN
DOI: https://doi.org/10.3969/j.issn.1000-3819.2011.04.015
2011-01-01
Abstract:Black silicon as a new material with low reflectivity and broad-spectrum absorption will be applied well in optoelectronics. In this paper, several black silicon fabrication methods including femtosecond laser scanning, chemical etching and plasma treatments are outlined. And the applications for solar cells, photoelectrical diode, field emission, and terahertz emission are also proposed.
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