Porous Silicon-Based Optical Fiber Fabry-Perot Sensor for Relative Humidity Determination

Guoguang Rong,Shengfei Pan,Chao Wu,Xiaobing Li,Minghong Yang
DOI: https://doi.org/10.1117/12.884851
2011-01-01
Abstract:A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85% RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.
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