Theoretical analysis of surface microwave discharge resonantly excited by surface plasmon polaritons

Zhaoquan Chen,Lingli Hong,Yelin Hu,Xiaoliang Zheng,An Yang,Ping Li,Longji Zhu,Minghai Liu,Lili Cheng,Qiyan Zhou,Xiwei Hu
DOI: https://doi.org/10.1109/CSQRWC.2011.6036893
2011-01-01
Abstract:The generation mechanism of surface microwave discharge is studied by analyzing the simplified surface-wave plasma model, from which we show the spatial distribution characteristics of the surface electromagnetic waves. According to the characteristics of overdense plasma interacting with high-frequency electromagnetic waves, we get there is the surface plasmon polaritons (SPPs) phenomenon placed at the interface between overdense plasmas and dielectric. The characteristic parameters of SPPs in overdense plasmas are obtained by altering the plasma density and the collision frequency. © 2011 IEEE.
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