Abstract:To meet the ever-increasing requirements for accurate manufacturing equipment, feedforward control has been widely regarded as an effective method. A nominal feedforward controller equals to the inverse model, which conventional model-based approaches could not acquire accurately due to the inevitable model error, the stability of the inverse model and so on. Therefore, a data-based feedforward control based on a parametric structure is proposed. The structure takes acceleration and snap set-points as signal inputs and both paths equip finite impulse response filters. Each finite impulse response filter is parameterized by a series of coefficients, assuming that the difference between the actual output and nominal output is an affine function of these coefficients. The coefficients are obtained from a gradient and Hessian approximation-based algorithm and optimized by minimizing a quadratic objective function. Two methods are proposed to approximate the gradient: the direct approach and the Toeplitz matrix approach. Finally, the proposed algorithm is assessed on a developed wafer stage. The results show that the proposed parametric structure improves the scanning tracking performance and provides a more desirable way to deal with the model with several resonances in low frequency.

Integrated Design of Feedforward and Feedback Control for Process Variation Reduction Based on Statistical Model

DOE-Based Hybrid Automatic Process Control for Variation Reduction

A Pid Controller With Neuron Tuning Parameters For Multi-Model Plants

A Closed-Loop Multivariable Quality Control Scheme for Injection Molding Process

Data-Driven Design of Feedback-Feedforward Control Systems for Dynamic Processes

Design of Regression Model-Based Automatic Process Control with Reduced Adjustment Frequency.

Process Adjustment with an Asymmetric Quality Loss Function

Data-Driven Design and Optimization of Feedback Control Systems for Industrial Applications

Integrated Design Method of A Cascade Iterative Learning Control for the Cascaded Batch/Repetitive Processes

Control Parameters Design of Spraying Robots Based on Dynamic Feedforward

Optimal feedforward control with a parametric structure applied to a wafer stage.

Deep Koopman-based Control of Quality Variation in Multistage Manufacturing Systems

Data-driven Feedforward Control on Active Vibration Isolation System

Surrogate model–based optimal feed-forward control for dimensional-variation reduction in composite parts' assembly processes

A Feed-Forward/Feedback Run-to-Run Control of a Mixed Product Process: Simulation and Experimental Studies

Modeling & Controlling of Product Quality in Serial-Parallel Hybrid Multi-Stage Manufacturing Systems

A Neuron Model-Free Controller With Fuzzy Self-Tuning Gain For Turning Processes

Model-Free Pid Controller with Neuron Tuning Gain for Turning Processes

Manufacturing Process Design and Control Based on Error Equivalence Methodology

An Online Tuning Method for Robust Control of Multivariable Nonlinear Processes with Nonanalytical Modules and Time Delay

Operation Output-Feedback Predictive Control Based on Model Order Reduction and Predictive Optimization in Industrial Processes