Study on PID Neural Network Temperature Control Algorithm for Crystal Growth Furnace

Yuan-chang ZHONG,Geng-tao GUO,Nian-long JIA,Zhen-zhen ZHAO
DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2010.05.055
2010-01-01
Abstract:A PID neural network controller of crystal growth temperature was designed using a digital PID and neural network fusion method of crystal growth furnace temperature measurement and control. A parallel architecture of the PID neural network was implemented using FPGA. The 32-bit IEEE754 single-precision floating-point computing unit is used in the neural network. Theoretical analysis and simulation results show that the neural network PID temperature controller with high control accuracy and response speed, helping to make crystal growth furnace temperature control accuracy and improve heating efficiency.
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