Studies of Alcohol Sensor Based on ZnO Nano-Rods/Single Crystal Si

Xiaoyan ZHOU,Wenxin WANG,Jing ZHANG
DOI: https://doi.org/10.3969/j.issn.1004-1699.2010.10.005
2010-01-01
Abstract:The ZnO thin films were prepared on single crystal silicon by the radio-frequency sputtering, and ZnO nano-rods were prepared on the ZnO films by hydrothermal method. The crystal structure, surface morphology, composition and crystal defects of the products were characterized by X-ray diffraction ( XRD), scanning electron microscopy(SEM), energy dispersive analysis of X-ray( EDAX) and photoluminescence( PL). It shows that ZnO nano-rods belong to the hexagonal wurtzite structure, have higher length-diameter and better crystallization. The paper studied the I-V characteristics, impedance and response-recovery time of ZnO nano-rods /single crystal Si sensor in air and alcohol gas. The resistance of ZnO nano-rods /single crystal Si sensor decreases by 71% in 0. 08 g/L ethanol gas at +6 V bias voltage, and response time is less than 1 min. It can serve as a new type of alcohol gas sensor with high sensing property.
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