Abstract:This research was motivated by the scheduling problem of parallel batch processing machines located in the diffusion and oxidation areas in a semiconductor wafer fabrication facility (wafer fab). The objective was to minimize the total weighted tardiness (TWT) on parallel batch processing machines which have incompatible job families, dynamic job arrivals, and constraints on the sequence-dependent setup time and the qualification-run requirements of advanced process control. Since the problem is NP-hard, an ant colony optimization (ACO) algorithm was used to achieve a satisfactory solution in a reasonable computation time. Extensive simulation experiments had been studied to demonstrate the effectiveness of the proposed method. The simulation results showed that the proposed ACO algorithm is superior to a modified Apparent Tardiness Cost-Batched Apparent Tardiness Cost rule adapted to dynamic job arrivals for minimizing the TWT. More machines or the bigger capacity, better improvement of the TWT is achieved. In addition, more machines, jobs or recipes require longer computation time, while bigger capacity requires less computation time.

A Hybrid Ant Colony Optimization Method for Scheduling Batch Processing Machine in the Semiconductor Manufacturing

An Ant Colony Optimization Approach for No-Wait Flow-Line Batch Scheduling with Limited Batch Sizes

Ant Colony Optimization For Intelligent Scheduling

A Hybrid Ant Colony Optimization Method for Scheduling Jobs on Parallel Batch Machines

Aco-Based Scheduling For A Single Batch Processing Machine In Semiconductor Manufacturing

ACO-based scheduling of parallel batch processing machines to minimize the total weighted tardiness

ACO-Based Scheduling of Parallel Batch Processing Machines with Incompatible Job Families to Minimize Total Weighted Tardiness

ACO-based multi-objective scheduling of parallel batch processing machines with advanced process control constraints

An Effective Ant Colony Approach for Scheduling Parallel Batch-Processing Machines

An ACO-based approach for inter-cell scheduling with various types of machines

A Chaotic Ant Colony Optimization Method for Scheduling A Single Batch-Processing Machine with Non-Identical Job Sizes

Ant Colony Optimization Based Scheduling for Single Batch Processing Machine

Bottleneck Station Scheduling in Semiconductor Assembly and Test Manufacturing Using Ant Colony Optimization.

Hybrid heuristic approach for inter-cell scheduling with various machine types

Scheduling Unrelated Parallel Machine to Minimize Total Weighted Tardiness Using Ant Colony Optimization

Adaptive Hybrid Ant Colony Optimization for Solving Dual Resource Constrained Job Shop Scheduling Problem.

A scheduling method in semiconductor manufacturing lines based on ant colony optimization

A Hyperheuristic Approach for Intercell Scheduling with Single Processing Machines and Batch Processing Machines

Algorithms for scheduling on parallel batch machines with non-identical capacities and non-identical job sizes

Scheduling a Single Batching Machine with Non-Identical Job Release Times and Sizes Using Ant Colony Clustering

Decomposition-based Classified Ant Colony Optimization Algorithm for Scheduling Semiconductor Wafer Fabrication System