A decentralized VPLs based control policy for semiconductor manufacturing

Shiqing Yao,Zhibin Jiang,Na Li,Ran Liu
DOI: https://doi.org/10.1109/IEEM.2010.5674371
2010-01-01
Abstract:In this paper, we propose a decentralized VPLs based control policy for semiconductor manufacturing. Based on utilizations and entropies, a new classification method is designed to decentralize global objectives into local objectives of workstations. Then a decentralized multi-objective scheduling policy is proposed to control Virtual Production Lines (VPLs). We generate two SMS cases from a test bed in order to evaluate multiple performances of the proposed policy. Experimental results validate the effectiveness in solving multi-objective scheduling problems for the semiconductor manufacturing system. ©2010 IEEE.
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