Abstract:This work developed a three-axis Hall angle sensor suitable for the standard CMOS process, which senses the tilt angle and the absolute strength of a random external magnetic field. Several cross-shaped Hall devices were first designed and fabricated using a 0.18- $\mu \text{m}$ CMOS process, and the measurement results have been used to build scientific and reasonable foundations for modeling a three-axis Hall using COMSOL. Inside the three-axis Hall sensor, cross-shaped Hall devices detect the magnetic field in the vertical direction ( ${z}$ -axis), whereas four-Folded three-contact vertical Hall devices (4-Folded 3CVHDs) detect the magnetic field in the two horizontal directions (x- and ${y}$ -axis). The developed model has been used to investigate the important factors influencing the accuracy of the three-axis Hall angle sensor including the process misalignment and variation of the n-well thickness due to the bias current. Unlike the traditional three-axis angle sensor based on the integrated magnetic concentrator (IMC), this work can directly combine the entire sensor interface on the chip, thereby significantly reducing manufacturing costs and packaging difficulties. Besides, four complementary Hall devices are used to eliminate the offset voltage when measuring the magnetic field in a similar direction. Finally, a simulated accuracy of 0.3° and 0.22° is achieved for the angles of $\alpha $ and $\theta $ , respectively, with an external magnetic field.

Cross axis effect of AMR sensors and single sensitive-axis compass

Compensation Method of Cross-Axis Effect for AMR Sensor

Design and Realization of Digital Compass with Magnetometers

Design and realization of digital electronic compass based on magnetoresistance sensors

An AC Magnetic Compass Based on Magnetoelectric Effect Integrated with a Calibration Algorithm

A Newsolution Algorithm Of Magnetic Azimuth

Development of a Compliant Magnetic 3-D Tactile Sensor with AMR Elements.

Attitude Solution and Error Compensation of Magnetic Compass

Modeling of Three-Axis Hall Effect Sensor Based on CMOS Process

Measurement of the anisotropy fields for AMR sensors

Design of Three Axis Fluxgate Digital Magnetic Compass

Angular Position Sensor Based on Anisotropic Magnetoresistive and Anomalous Nernst Effect

Development of three-dimensional magnetic resistance electronic compass

High-sensitivity Operation of a Single-Beam Atomic Magnetometer for Three-Axis Magnetic Field Measurement.

Integration micro-magnetic sensor and accelerometer microsystem for orienting application

Highly Sensitive Magnetic Sensor Based on Anisotropic Magnetoresistance Effect

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

A Magnetoelectric Compass for In-Plane AC Magnetic Field Detection

Error-separation Method for the Calibration of Magnetic Compass