Design and Implementation of Surface Shape Control System for Membrane Mirror

ZHANG Geng-sheng,TANG Min-xue,SHEN Wei-min,YU Jian-jun
DOI: https://doi.org/10.3969/j.issn.1007-2276.2010.06.020
2010-01-01
Infrared and Laser Engineering
Abstract:Surface shape control is one of the key technologies for the manufacture of membrane mirror.A new surface shape control system for membrane mirror was designed on the basis of fuzzy logic control technology which contained such function modules as surface shape design,control,analysis,simulation and etc.The system functions were realized by using hybrid programming of Visual C# and MATLAB.And the ANSYS finite element analysis function was embedded in the simulation system.The controller was designed by means of controlling the sag of the mirror′s central cross-section.The surface shape of the membrane mirror and its optical aberration were obtained by using Zernike polynomial fitting.The simulation analysis of surface shape control and disturbance response was performed for a membrane mirror with 300 mm aperture and F/5.The result of the simulation shows that by using the designed control system,the RMS wavefront error of the mirror can be decreased to 71λ(λ=632.8 nm),which is consistent to the surface error of the membrane mirror obtained by the large deformation theory of membrane under the same condition.
What problem does this paper attempt to address?