Subaperture moving strategy and related systematic errors in stitching interferometry of X-ray mirrors
Qiaoyu Wu,Qiushi Huang,Wenwen Zhang,Zhao Shi,Ming Li,Changrui Zhang,Yumei He,Hongxin Luo,Jun Yu,Weichen Gu,Zhong Zhang,Zhanshan Wang
DOI: https://doi.org/10.1364/oe.541002
IF: 3.8
2024-12-05
Optics Express
Abstract:Qiaoyu Wu, Qiushi Huang, Wenwen Zhang, Zhao Shi, Ming Li, Changrui Zhang, Yumei He, Hongxin Luo, Jun Yu, Weichen Gu, Zhong Zhang, Zhanshan Wang For high-precision metrology of X-ray mirrors, the subaperture moving strategy significantly impacts the accuracy of stitching ... [Opt. Express 32, 45691-45706 (2024)]
optics