Process study on KDP crystal polished by picosecond laser
Xiaohua HAN,Leimin DENG,Baoye WU,Keqiang BAI,Xiang ZHOU,Peng LIU,Jun DUAN
DOI: https://doi.org/10.7510/jgjs.issn.1001-3806.2018.02.005
2018-01-01
Abstract:In order to improve the difficulty and low efficiency of precision machining of KDP crystal, picosecond ultrafast laser was used in KDP crystal polishing. The influence of the factors of laser wavelength, pulse energy density, laser beam incident angle,overlapping rate, scan mode and laser focal depth on laser polishing quality of KDP crystal was studied. The interaction mechanism of laser and KDP crystal was analyzed. The experimental results show that,with the optimal parameters, such as,picosecond laser wavelength λ of 355nm,focal length f of 56mm,laser beam incident angle α of 84°, laser repetition frequency F of 800kHz,pulse energy density Q of 2.4J/cm2,overlapping rate O of 60%,45° multi direction cross scanning and processing times T of 10,root mean square of surface roughness of KDP crystal can reach 76nm. The results add the supplements for the research of laser polishing technology.