Research on pressure sensor based on conductive composite thin film

ShouLi Wang,Tianhuai Ding,Peng Wang

2008-01-01

Abstract:For the measurement of the compression pressure and relaxation stress between two faces on a defending equipment, a carbon black filled silicone rubber thin film was layer-by-layer spin casted on the PCB substrate directly, a piezoresistive conductive thin film was prepared successfully. By this method, the surface cracks and falling off of the silicone rubber from substrate was avoided, at the same time, by the direct vulcanization of rubber on the electrodes, the contact resistance between the rubber and electrodes was reduced by large. By the experiments under exciting electrical fields of different frequencies, the results show that the thin film exhibits an obvious positive piezoresistive coefficient effect; the response of the film to the pressure is affected by the loading procedure and the exciting frequency: When the film is continuously loaded, the response is a double exponential function; when the film is loaded step-wise, the response is a linear function; the response when excited by high frequencies and DC is less sensitive than that when excited by low frequencies; the response when excited by DC exhibits smaller repeatability error and larger hyteresis than that when excited by relative high frequencies.