Cascade Multi-degree-of-freedom Electromagnetic Micro-Grating: Achieving Amplified Scanning Angle without Sacrificing Linearity
Yuanyuan Zhou,Hanpei Xu,Xingquan Yuan,Quan Wen,Dongling Li
DOI: https://doi.org/10.1109/jsen.2024.3388454
IF: 4.3
2024-01-01
IEEE Sensors Journal
Abstract:Micro-gratings have become pivotal components in advanced optical systems, offering precise light manipulation and analysis. However, achieving a high spectral resolution and enlarged scanning angles without sacrificing linearity remains a challenging endeavor. This paper presents an electromagnetically driven micro-grating designed to address these challenges. To achieve these enhancements, our work employs a multi-degree-of-freedom resonator design which comprises a grating, an actuator coil frame, an integrated angle sensor, and four cantilever torsion springs. The scanning angle amplification effect is realized through optimizing the MIMO (Multiple-Input-Multiple-Output) behavior associated with the system’s second-order harmonic. With the amplification effect of scanning angle, a minor displacement in the actuator coil frame can achieve a significant scanning angle on the grating. A theoretical model of proposed multi-degree-of-freedom design has been established together with a finite element simulation model. The potential optimization parameters have been analyzed and discussed in detail. We fabricated a demonstrator based on Flame-Retardant-4 material, and the experiment results showed the device with mirror size 12mm × 12mm could reach a 6.94° scanning angle with a 75 mArms drive current. The amplification ratio of 1.84 (drive coil 3.77°) could be observed aligning well with harmonic simulation’s prediction. Also, The micro-grating exhibits excellent linearity with a correlation coefficient of 0.99979.
engineering, electrical & electronic,instruments & instrumentation,physics, applied