Ionization, electron attachment and drift in CHF 3

Liu Xueli,Li Xuguang,Xiao Deng-ming
DOI: https://doi.org/10.1109/ichve.2008.4774034
2008-01-01
Abstract:This paper have measured the density-normalized effective ionization coefficients (alpha-eta)/N, (alpha and eta are the ionization and attachment coefficients, respectively) and the electron drift velocity Ve in Carbon tetrafluoride (CF4) using a pulsed Townsend technique. The overall density-normalized electric field strength E/N ranged from 50 to 250 Td (1 Td=10-17 Vcm2). From the above plots for (alpha-eta)/N, we have derived the limiting or critical field strength, (E/N)limap128 Td, which is the value of E/N at which (alpha-eta)/N=0.
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