Humidity properties of nanostructured zinc oxide coated quartz crystal microbalance

jia-yun LV,xiao-feng ZHOU,jian ZHANG,tao JIANG,wei-jing LIU
DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.03.016
2008-01-01
Abstract:This paper describes an application of quartz crystal microbalances (QCM) coated with nanocrystalline ZnO used as relative humidity sensors. The technique to prepare the nanocrystalline ZnO and the system to proceed the relative humidity testing are presented. Sensing mechanism is examined by measuring the resonance frequency shift of QCM which due to the additional mass loading. The results showed that the sensors developed have high humidity sensitivity, good reproducibility.
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