Abstract:3D micro/nanofabrication techniques have recently attracted increased attention due to their promise in a wide range of applications including integrated optics, plasmonics, microbiology, and microelectromechanical systems (MEMS). Similar to 3D fabrication at macro scales, 3D micro/nanofabrication generally requires two fundamental approaches: additive and subtractive processes. Although both additive and subtractive micro/nanofabrication methods are established separately, they have been largely isolated and difficult to be integrated due to either material incompatibilities or significant differences in laser processing parameters. Fabricating advanced devices of complex 3D geometries calls for the use of both additive and subtractive processes. In this work, we successfully integrated an additive (TPP) and a subtractive (MPA) process into a single fs laser direct writing system (Photonic Professional, Nanoscribe GmbH) in which process conditions could be precisely controlled. The integrated fabrication method not only inherits the merits of both TPP and MPA such as writing resolution smaller than the diffraction limit and features with sharp and clean edges, but it also offers the possibility to produce novel device structures which are difficult to be fabricated by either TPP or MPA alone.

Integrated 3-D Simulation Tool for Micro and Nano Fabrication

Simulation and Experimental Investigation of Immersion Flow Field in Immersion Lithography

Voxel-Based Modeling And Rendering For Virtual Mems Fabrication Process

Modeling and implementation of a virtual lithography system for micromachines

Photolithography Process Simulation for Integrated Circuits and Microelectromechanical System Fabrication

Three-Dimensional in Situ Electron-Beam Lithography Using Water Ice.

An Improved 3d Simulator For Mems Processes

Integrated Modeling, Simulation, and Visualization for Nanomaterials

MEMS Lithography Collaborative Simulation Environment Research

Cyber Coordinated Simulation for Distributed Multi-Stage Additive Manufacturing Systems

Modeling and Simulation of Nano-Interconnects for Nanophotonics

Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method

A Three-Dimensional Surface Miacromachining Process Simulation System Based on the Narrow Band Level Set Method

Simulation of Solidification Process of Micro Stereo Photolithography

Simulation of Nanoimprint Based on PSQ-L Polymer

Integrated 3d Multi-Physical Simulation of A Microfluidic System Using Finite Element Analysis

Additive and Subtractive 3D-Microfabrication of Micro/nanostructures

Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications

Nanostructures and Nanodevices Special Fabrication and Characterization

Negative Chemical Amplification Process Simulation in Integrated Circuits and Microelectromechanical Systems Fabrication

Molecular Dynamics Integration Simulation System for Micro Structure