Monte Carlo Simulation of Electron Swarms Parameters in C-C 4 F 8 /CF 4 Gas Mixtures

Xue-li Liu,Deng-ming Xiao,Yan-an Wang,Zhou-sheng Zhang
DOI: https://doi.org/10.1007/s12204-008-0443-7
2008-01-01
Journal of Shanghai Jiaotong University (Science)
Abstract:The swarm parametes for c-C 4 F 8 /CF 4 mixtures, including the density-normalized effective ionization coefficient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td, while the c-C 4 F 8 content in gas mixtures is varied in the range of 0–100%. The value of the density-normalized effective ionization coefficient shows a strong dependence on the c-C 4 F 8 content, becoming more electronegative as the content of c-C 4 F 8 is increased. The drift velocity of c-C 4 F 8 /CF 4 mixtures is more affected by CF 4 . The calculated limiting field strength for c-C 4 F 8 /CF 4 mixtures is higher than that of SF 6 /CF 4 .
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