Abstract:Using polarization-maintaining fiber (PMF) in dual-frequency heterodyne interferometry has the advantages of reducing the laser's own drift, obtaining high-quality light spots, and improving thermal stability. Using only one single-mode PMF to achieve the transmission of dual-frequency orthogonal, linearly polarized beam requires angular alignment only once to realize the transmission of dual-frequency orthogonal, linearly polarized light, avoiding coupling inconsistency errors, so that it has the advantages of high efficiency and low cost. However, there are still many nonlinear influencing factors in this method, such as the ellipticity and non-orthogonality of the dual-frequency laser, the angular misalignment error of the PMF, and the influence of temperature on the output beam of the PMF. This paper uses the Jones matrix to innovatively construct an error analysis model for the heterodyne interferometry using one single-mode PMF, to realize the quantitative analysis of various nonlinear error influencing factors, and clarify that the main error source is the angular misalignment error of the PMF. For the first time, the simulation provides a goal for the optimization of the alignment scheme of the PMF and the improvement of the accuracy to the sub-nanometer level. In actual measurement, the angular misalignment error of the PMF needs to be smaller than 2.87° to achieve sub-nanometer interference accuracy, and smaller than 0.25° to make the influence smaller than ten picometers. It provides theoretical guidance and an effective means for improving the design of heterodyne interferometry instruments based on PMF and further reducing measurement errors.

Nonlinear Errors of Passive Homodyne Polarized Laser Interferometer

Research on Wave Plate Error of Polarized Laser Interferometer

Research On Errors Of Half-Waveplate And Quarter-Waveplates In Polarized Laser Interferometer

Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method

Effects of Wave Plate on Nonlinear Errors in Polarization Laser Interferometer

Influence Of Nonlinear Error On Measuring Accuracy For A Dual-Frequency Heterodyne Interferometer Using A Polarization Maintaining Fiber

Analysis of Polarization Error of Sensors Based on Michelson Interferometer

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Investigation of Heterodyne Interferometer Technique for Dynamic Angle Measurement: Error Analysis and Performance Evaluation

Error Analysis of Heterodyne Interferometry Based on One Single-Mode Polarization-Maintaining Fiber.

Effect of Nonlinearity by the Polarizer in Laser Heterodyne Interferometric

Compensation of Nonlinear Errors in Laser Heterodyne Interferometers

Sub-nanometer Periodic Nonlinearity Error in Absolute Distance Interferometers.

Synthetic Model of Nonlinearity Errors in Laser Heterodyne Interferometry

Effect of Nonlinearity by the Rotation of the Polarizer in Laser Heterodyne Interferometric

Homodyne Laser Interferometer Involving Minimal Quadrature Phase Error to Obtain Subnanometer Nonlinearity.

Nonlinear Errors Resulting From Ghost Reflection And Its Coupling With Optical Mixing In Heterodyne Laser Interferometers

Effect of Asymmetrical Transfer Coefficients of A Non-Polarizing Beam Splitter on the Nonlinear Error of the Polarization Interferometer

Zeeman laser interferometer errors for high-precision measurements

Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer

Nonlinearity Correction Method Study of Orthogonal Polarized Laser Interference Signal Based on DSP Technique