Experimental Study of Disharge Characteristics and Fluorine Atom Yield on DC Discharge of NF 3 /He

Liping Duo,Shukai Tang,Haijun Yu,Jian Wang,Liucheng Li,Yuqi Jin,Balling Yang,Fengting Sang
DOI: https://doi.org/10.1117/12.739116
2006-01-01
Abstract:DC discharge characteristics of NF3/He have investigated experimentally at many kinds of experimental conditions, for example, different electrodes material, a few of distance between the two electrodes, flow rates of the gas NF3 or He, a series of series-wound resistances and give the steady and optimum discharge parameters finally. Fluorine atom yield from the DC discharge of NF3/He have studied experimentally and the relationship of fluorine atom yield and the load power is shown for the first time.
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