A distributed open control system based on service oriented architecture

Wei Wang,Yannan Zhao,Hua Xu,Peifa Jia
DOI: https://doi.org/10.3321/j.issn:1002-0470.2007.01.001
2007-01-01
Abstract:This paper proposes a new SOA-based distributed open controller system model. The whole model consists of four layers, the abstract device layer, the basic control layer, the service layer, and the application layer. Each layer is designed using object oriented pattern. The layers are relatively independent from each other. The service layer contains all of the service abstraction of the distributed subsystems for application layer. This control model improves the system's openness and development efficiency, and makes the subsystems reusable. Based on it, a prototype of wafer transfer system in etching tools in IC industry has been developed successfully and the system performs well.
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