Abstract:Conducting a comprehensive molecular-level evaluation of a photoacid generator (PAG) and its subsequent impact on lithography performance can facilitate the rational design of a promising 193 nm photoresist tailored to specific requirements. In this study, we integrated spectroscopy and computational techniques to meticulously investigate the pivotal factors of three prototypical PAG anions, p-toluenesulfonate (pTS-), 2-(trifluoromethyl)benzene-1-sulfonate (TFMBS-), and triflate (TF-), in the lithography process. Our findings reveal a significant redshift in the absorption spectra caused by specific PAG anions, attributed to their involvement in electronic transition processes, thereby enhancing the transparency of the standard PAG cation, triphenylsulfonium (TPS+), particularly at ∼193 nm. Furthermore, the electronic stability of PAG anions can be enhanced by solvent effects with varying degrees of strength. We observed the lowest vertical detachment energy of 6.6 eV of pTS- in PGMEA solution based on the polarizable continuum model, which prevents anion loss at 193 nm lithography. In addition, our findings indicate gas-phase proton affinity values of 316.4 kcal/mol for pTS-, 308.1 kcal/mol for TFMBS-, and 303.2 kcal/mol for TF-, which suggest the increasing acidity strength, yet even the weakest acid pTS- is still stronger than strong acid HBr. The photolysis of TPS+-based PAG, TPS+·pTS-, generated an excited state leading to homolysis bond cleavage with the lowest reaction energy of 83 kcal/mol. Overall, the PAG anion pTS- displayed moderate acidity, possessed the lowest photolysis reaction energy, and demonstrated an appropriate redshift. These properties collectively render it a promising candidate for an effective acid producer.

Studies on the Acid-Generation Properties of a New Phthalocyanine Derivative as Photoetching Recording Materials

The Heteroleptic Cu(I) Photosensitizer-Containing 3,8-Disubstituted Phenanthroline: Synthesis, Photophysical Properties And Photocatalytic Hydrogen Evolution From Water

Phthalimide based new photocatalysts featured with highly selective photodegradation of azo-dyes and good photocatalytic activity in both homogeneous and heterogeneous systems

Synthesis of a new Zn-phthalocyanine, photophysical, photochemical, and sono-photochemical properties and DFT studies

Synthesis of novel photochromic dithienylethenes and investigation on their optoelectronic properties

Synthesis of Novel Thioxanthone-Containing Macromolecular Photosensitizer and Its Photocatalytic Property

A comprehensive study on three typical photoacid generators using photoelectron spectroscopy and ab initio calculations

Synthesis and Electrochemical Properties of a Series of Novel Tetra(4-Benzoyl)phenoxyphthalocyanine Derivatives

Photochemical DNA Cleavage by Novel Water-Soluble Sulfonated Dihydroxy Phosphorus(v) Tetrabenzotriazacorrole.

Synthesis of ester substituted copper phthalocyanines by phase transfer catalysis reaction and their photoconductivity

Study on phosphorus (III) complex of tetrabenzotriazacorrole: A novel phthalocyanine-like photosensitizer

Synthesis, characterization, photophysical and photochemical properties of peripherally tetra-1,2,4-triazol-3-ylthio substituted metal-free phthalocyanine and its zinc(II) and lead(II) derivatives

Photophysical properties of sulfonated dihydroxy phosphorus(V) tetrabenzotriazacorrole.

Synthesis of Polymeric Phthalocyanine Sulfonate Photosensitizer and Its Photodegradation on Rhodamine B in Aqueous Medium

Synthesis and spectral study of novel para-hydroxyphenoxy phthalocyanines

Acid-induced tunable white light emission based on triphenylamine derivatives

Synthesis And Characterization Of Novel Soluble Metal-Free Phthalocyanine Sulfonyl Compounds

Multifluorescence Emission of Several Novel Phthalocyanines As Potential Photodynamic Diagnosis Materials

Electron Donor and Acceptor Functionalized Dithienylethenes: Effects of Charge Density on Photochromic Properties

Design, Synthesis, Crystal Structures, and Photophysical Properties of Tetraphenylethene-Based Quinoline Derivatives