Abstract:Laser-sustained plasmas (LSP), which can be utilized for a novel radiation light source, have advantages such as high irradiance, broad spectral range, and stable emission, demonstrating significant applications for wafer inspection in the field of the semiconductor industry. This paper revisited the historical development of LSP research and introduced fundamental physical processes in LSP. The mathematical description equations for LSP and methods for calculating plasma parameters are given, based on which a time-dependent two-dimensional fluid model is established with laser-thermal-hydrodynamic coupling effects. The propagation of the laser in plasmas is investigated based on the established model, and the fundamental mechanisms in LSP, including the initial evolution process, laser energy deposition, steady-state characteristics, and instability, are explored. The effectiveness of the simulation model is confirmed through comparisons with the results from high-pressure Xe LSP experiments. The findings indicate that the mode, power, F number of incident lasers, as well as parameters including components, pressure, and flow velocity of gas, influence the steady-state properties of LSPs. Under identical power and F number conditions, Gaussian mode and annular mode lasers produce LSP with different shapes and positions. Notably, under conditions of high-power annular laser incidence, large laser F numbers, and high flow velocities, the simulation results reveal temporal and spatial instability in LSP. These simulation results contribute significantly to a deeper understanding of the underlying physical mechanisms of LSP. Furthermore, they provide a theoretical basis for the design of light source systems and the optimization of multiple parameters. The impact of laser parameters on LSP properties elucidated in this study advances not only the fundamental understanding of LSP but also offers crucial insights for the design and optimization of light source systems in various applications, particularly in the field of optical detection for semiconductor wafer inspection.

Self-focusing, Raman, and modulation instability of shaped relativistic laser pulse in plasmas

Self modulation and scattering instability of a relativistic short laser pulse in an underdense plasma

Self-modulation of an Intense Laser Beam in Near-Critical Homogeneous Plasma

Effect of Laser Polarizations on Surface Instability of Dense Plasma Irradiated by Relativistic Intense Laser Pulses

Condition of Laser Pulse Width for Relativistic Self-Focusing

Dynamic Characteristics of Growing Modes of Raman Instability from Intense Laser Beam Propagating Through Plasma

Self-compression and splitting of laser pulse in plasmas

Linear Theory Of Multibeam Parametric Instabilities In Homogeneous Plasmas

Modulational Instability of Ultra-Intense Linearly Polarized Laser Pulse in Electron–positron Plasmas

Pattern Dynamics and Filamentation of Relativistic Laser Pulses Propagating in Underdense Plasmas

Electronic parametric instabilities of an ultrarelativistic laser pulse in a plasma

Nonlinear Properties of Relativistically Intense Laser in Plasmas

Anisotropic Filamentation And Modulation Of Ultra-Intense Linearly Polarized Laser Light In Overdense Plasma

Intensity Dependence of Relativistic Focusing of Intense Laser Beams Propagating in Plasmas

Pseudorelativistic laser-semiconductor quantum plasma interactions.

Self-shaping of a Relativistic Elliptically Gaussian Laser Beam in Underdense Plasmas

On parallel laser beam merger in plasmas

Post-solitons and Electron Vortices Generated by Femtosecond Intense Laser Interacting with Uniform Near-Critical-density Plasmas

Transition from backward to sideward stimulated Raman scattering with broadband lasers in plasmas

Multiphysics Modeling and Simulations of Laser-sustained Plasmas

Laser Self-Focusing in the Presence of Quasistatic Axial Direct Current