Abstract:Ultrasonic motors (USMs) are widely used in many applications where precise and fast motions are required, such as precision machines and medical devices, etc. In this paper, an USM-driven X-Y stage is investigated. Several issues arise for the precision motion control of the stage, such as the nonlinearities of USMs and the coupling effects in the multi-DOF configuration. To address these challenges, an intelligent controller consisting of a cerebellar model articulation controller (CMAC) and a sliding mode compensator (SMC) is designed. Therein, the CMAC is employed due to its fast learning ability while the SMC is used to compensate the approximation error between the CMAC and the desired compensation controller. To further accelerate the error convergence, a Proportional-Integral-Derivative (PID) controller is designed for each USM. Due to the decentralized control structure, a constrained Linear-Quadratic (LQ) optimization algorithm is employed to optimize the PID controller gains. In this way, a control scheme combining the optimal PID controllers with the intelligent controllers is developed. Lastly, several experiments are carried out to verify and validate the effectiveness of the proposed control scheme.

Fuzzy-Adaptive Control to Cylinder-Sphere 3-DOF Ultrasonic Motor

Globally stable robust tracking of uncertain systems via fuzzy integral sliding mode control

Optimal and Intelligent Motion Control Scheme for an Ultrasonic-Motor-Driven X-Y Stage

Position Servo Control for Pneumatic Actuator with Fuzzy PID

Fuzzy PID Controller Based on Yaw Angle Prediction of a Spherical Robot*

Hybrid fuzzy PID control of hydraulic robot

Design of Fuzzy Control System for PMSM Based on DSP

Overview of Attitude Detection and Control of Multi-degree-of-freedom Spherical Ultrasonic Motor

Motion Synchronization of Dual-Cylinder Pneumatic Servo Systems with Integration of Adaptive Robust Control and Cross-Coupling Approach.

Fuzzy PID Controller Design for a Permanent Magnet Linear Synchronous Motor Feeding System

Vector Control to Cylinder-Sphere 3-DOF Ultrasonic Motor

Servo control for ultrasonic motor using fuzzy logical and self-tuning technique

Adaptive Sliding-Mode Control with Self-Tuning Fuzzy Compensation for a Piezoelectric-Actuated X-Y-Z Table

Fuzzy Auto-Tuning PID Control of Multiple Joint Robot Driven by Ultrasonic Motors.

Position Control of an Ultrasonic Motor Using Fuzzy-PI Technique

Fuzzy-neuron Network Control Techniques Applied to a Robot Driven Directly by Ultrasonic Motors

Adaptive fuzzy controller with intelligent integrator in active magnetic bearing systems

A Neuron Adaptive PID Speed and Position Control for Ultrasonic Motors

Precise position control of ultrasonic motor using fuzzy control with dead-zone compensation

The Application of Fuzzy-PID Controller on Servo System

A Novel Two-Degree-of-freedom Spherical Ultrasonic Motor Using Three Travelling-Wave Type Annular Stators