An Inline Type Microwave Power Sensor Using Gaas Mmic Process

Lei Han,Qing An Huang,Xiao Ping Liao
DOI: https://doi.org/10.1109/NEMS.2006.334878
2006-01-01
Abstract:The theory, design, fabrication and measurements of a novel structure for measuring the power of microwave signals are presented based on MEMS technology. The advantage of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the novel power sensor is fully compatible with the GaAs MNUC process. The simulation, process and experiment results of this sensor are given.
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