ACTIVE VIBRATION CONTROL FOR ARM STRUCTURE UNDERGOING HIGH ACCELERATION MOTION AND PRECISION POSITIONING

Shuo ZHOU,YunTang LI,Guang MENG,Han DING
DOI: https://doi.org/10.3321/j.issn:1001-9669.2006.01.002
2006-01-01
Abstract:The high acceleration motion and precision positioning of rigid/flexible motion coupled structure is the key functional requirement for space structure, precision instrument and robot, which characterized in high technology and science fields. With the rapidly development of information technology (FT), the high acceleration motion and precision positioning also became the core technique issue in microelectronic and semiconductor manufacturing. The high speed motion/precision positioning arm structure in microelectronic and semiconductor manufacturing is investigated, first reviews and summarizes the related rigid/flexible coupled dynamics accomplishments, then classifies and analyzes the active vibration control methods used hitherto, at last, presents the pending problems and corresponding solutions or ideas by close associating practical engineering background to make further development or breakthrough.
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