An Estimation of Z-pinch Plasma Radiation Source for EUVL by Using Artificial Neural Networks

CH Zhang,CG Ji,JG Shi,S Katsuki,A Kimura,H Fukumoto,H Akiyama
DOI: https://doi.org/10.1117/12.674192
2006-01-01
Abstract:Non-equilibrium ionization plays a critical role in Z-pinch gas discharge produced plasma (GDPP) EUV source. However, the physics of the processes, plasma and surface discharges produced, magneto-hydrodynamic, photon radiation transport, and plasma-electrode interactions, which lead to EUV emission, is intrinsically complex. Many simplifying assumption are inevitable with numerical simulations, resulting in low-credibility outcomes. With the learning and generalization abilities, artificial neural networks (ANN) have been applied to model and optimize a Zpinch plasma source, which is characterized with a experimental design at varied operational parameters including electric power input, applied voltage/current, pulse repetition, MPC parameters, electrode geometry, xenon flow rate as well as convention efficiency, EUV source size, radiation power etc.
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