Adaptive Switching Control Method for Active Vibration Isolation

S. Zhou,Y. T. Li,G. Meng,H. Ding

DOI: https://doi.org/10.1109/amc.2006.1631703

2006-01-01

Abstract:There exists serious vibration problem in microelectronic manufacturing field. The complex dynamics characteristic limits the application of active vibration isolation (AVI) technology. This paper presents the modified multiple model switching tuning (MMST) control scheme basing on the filtered linear quadratic Gaussian (LQG) controller, realizes the tracking and intensive suppression of dominant vibration frequency and broadband attenuation of disturbance/noise. The superior control performance and anti-noise ability of presented method under complex vibration environment is demonstrated by simulations