Study of FeCo-SiO2 Granular Films for High Frequency Application

Ge, S.,Yao, D.,Kim, K.,Yang, X.
DOI: https://doi.org/10.1109/intmag.2006.375631
2006-01-01
Abstract:In this work, Fe 65 Co 35 alloy which has maximum saturation magnetization (Ms) among all metal magnetic materials was chosen to make Fe 65 Co 35 -SiO 2 granular films, and the magnetic properties in whole composition were studied. The results show that good high frequency soft magnetic films were obtained by carefully controlling the microstructure. A serious (Fe 65 Co 35 ) x (SiO 2 ) 1-x granular films are fabricated by RF magnetron co-sputtering. X-ray diffraction shows that all samples have bcc structure of Fe 65 Co 35 alloys. Transmission electronic microscope (TEM) image and the corresponding electronic diffraction (ED) pattern for a typical sample of x = 0.57 show that the sample consists of bcc Fe 65 Co 35 particles embedded uniformly in insulating SiO 2 matrix. Magnetic hysteresis loops measured by vibrating sample magnetometer (VSM) shows that the samples have in plane uniaxial anisotropy, and anisotropy field is around 60 Oe.
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