Electric Field Distribution between Recessed and Un-recessed Interdigital Electrodes of MSM Structures

Bing-zhen REN,Jin-she YUAN,Guang-de CHEN
DOI: https://doi.org/10.3969/j.issn.1001-5868.2006.04.019
2006-01-01
Abstract:A new type metal-semiconductor-metal (MSM) detector with recessed interdigital electrodes is proposed. The electric field distribution in active layer is simulated using numerical methods. The effect of depth of the electrodes is analyzed through computer simulation. The dissimilarity of the MSM detectors with and without recessed interdigital electrodes is discussed. The results are significant in improving the performances of MSM photodetectors and optimizing the design of the structure.
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