Development of Broadband Polarizing Beam Splitter/Combiner

Liang Zhang,Chengfang Li,Wen Liu,Libing Zhou,Guoyang Wu,Dingli Wang
DOI: https://doi.org/10.3321/j.issn:0253-2239.2006.07.018
2006-01-01
Abstract:To Overcome the shortages of conventional polarizing beam splitters, narrow waveband and limited angle range, a polarizing beam splitter/combiner with wide waveband and angle range of 180° is developed. The device is designed with the principle of wire grid polarizer and subwavelength grating structure, and etched with semiconductor technique. Large pass width, acceptable angle and beam splitting angle, high extinction ratio and low insert loss are achieved based on that there exists only zeroth-order diffraction for the polarizing response of one-dimensional metal wire grid polarizer on the incident electromagnetic wave and subwavelength grating. The experiment verifies that the transmission and reflection extinction ratio is beyond 20 dB, insert loss below 0.5 dB. On the home-constructed microstructure testing platform, the transmissivity and reflectivity variation with the incident angle for the p and s components is obtained, which agrees well with simulated result by the rigorous coupled wave approach. The influence of excessive etching on the performance of the beam splitter/combiner during fabrication is analyzed deeply.
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