A Fast Algorithm of Gaussian Filtering for Three-Dimensional Surface Topography

JB Xu,YB Yuan
DOI: https://doi.org/10.1117/12.664330
2005-01-01
Abstract:The 2D Gaussian filter was realized in approximation method. A fast algorithm of 2D Gaussian filtering is presented to determine the reference surface for 3D surface topography. The 2D Gaussian filter can be separated into two 1D Gaussian filters, an x-direction Gaussian filter and a y-direction Gaussian filter. A 1D Gaussian filter can be implemented approximately by the cascaded moving average filters. More cascaded moving average filters result in higher filtering accuracy. A recursive algorithm for 2D Gaussian filtering is deduced from a moving average algorithm. This algorithm requires only some simple mathematical operations such as addition, subtraction and a small number of multiplications, so that it has considerable computational efficiency which is very important for 3D surface topography measurement.
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