Micro Pressure Sensor Array Used to Detect Boundary-Layer Separation Point

Shuang Chen,Mingquan Zhu,Jinjun Deng,Binghe Ma,Chengyu Jiang
DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.050
2005-01-01
Abstract:This paper discussed a measuring method of boundary-layer separation point which based on the change of surface static pressure distribution, and proposed a design of flexible substrate based micro pressure sensor array. This array can achieve real-time online measuring of non-planar surface. This design proposal of micro pressure sensor array can effectively meeting the measuring requirement of boundary-layer separation point, and expand engineering applied scope of MEMS devices.
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