Research and prospect on functional thin films by sol-gel process

Hui Yang,Yamei Miao,Xingeng Ding
DOI: https://doi.org/10.3321/j.issn:1002-185x.2004.z1.056
2004-01-01
Rare Metal Materials and Engineering
Abstract:Diversified functions of materials, and the micromation and integration of various components permit thin film to be used more and more widely and requires more and more advanced manufacturing technique. This article reviews the recent research of sol-gel process on optical, electrical, wear resistant and erosion resistant functional thin films, and gives the prospect on the usage of sol-gel process.
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