Abstract:This paper proposes a general testing model for instruments and several testing approaches to test instruments in integrated circuit (IC) equipment. Three levels of mirror models are built to describe the hierarchical construction of units under test in IC equipment, which is used to simulate the internal structure and component relationship of tested instruments. By using different types of data acquisition (DAQ) cards and corresponding drivers, a concept of virtual pin is proposed to establish a bridge between the software and hardware aspects of the automatic test system (ATS). To improve the flexibility of the ATS, the testing procedure for a single instrument or equipment is divided into mirror model configuration and runtime control. By this way, the same mirror model can be adapted to different testing applications. To meet the needs of reusability of mirror models and transportability of testing applications, various configurations are serialized and deserialized via Extensible Markup Language files. Based on industrial personal computer and DAQ cards, an ATS prototype named IC Equipment Tester (ICETester) was developed to support the proposed mirror model and testing methods. The prototype was implemented for the development of plasma-enhanced chemical vapor deposition (PECVD) equipment, which proved that ICETester is efficient and flexible to test instruments in the PECVD equipment.

Fault Injection System for Automatic Testing System

A new fault in jection method for VXIbus automatic testing system

Reliability Evaluation Of Automatic Testing System Using For Fault Injection

Software Simulation-Based Fault Injection Tool of Virtual Machine System

Fault Injection Automatic Test Platform Based on STAF

Analog Circuit Simulation Approach with Multi-Fault Injector

Study on Software Fault Injection Based on Onboard System

Study of fault injection system based on software

Study on Fault-Tolerant Based on Modular Method in the Development of Test and Control System Software

Test Method on Code Injection Vulnerabilities of Web Application

Fault Injection Based on Software: Models, Methods, Tools

Research of Key Technical Issues on Handset MMI Automated Testing System

A Software Fault Injection Tool for Evaluation of the Dependability of Onboard System

A General Automatic Test System for Instruments in IC Equipment

Fault Injection System Based on Software

Hardware Fault Injection Tool Based on JTAG

Study of Fault-Injection for FPGA Based Fault-Tolerant Computer

Fault Injection Technology for Software Vulnerability Testing Based on Xen

Simics-based System Level Fault Injection Platform

An Automated Fault Injection Technique Based On Vhdl Syntax Analysis And Stratified Sampling

Validation Of Fault Tolerance Mechanisms Of An Onboard System