Design and Application of Reflective Lcos Based Amplitude Spatial Light Modulators

X Wang,HT Dai,YJ Liu,KS Xu

DOI: https://doi.org/10.1117/12.523477

2004-01-01

Abstract:Several modes are simulated in parameter space to find profitable mode for amp SLM design and RTN52degrees with high reflectance, high dDeltan and low phase shift is used for experiment. The reflectance and contrast are measured on a RTN52degrees LCOS device.

What problem does this paper attempt to address?

Design of High-Level Reflectivity Thin Film Spatial Demultiplexer

JIN Bo,CHEN Hai-xing,ZHANG Yue-guang,GU Pei-fu,LIU Xu

DOI: https://doi.org/10.3785/j.issn.1008-973x.2005.04.004

2005-01-01

Abstract:A new design method for multilayer thin film spatial demultiplexer based on Superprism phenomenon of periodic photonic crystal was presented. Without complex techniques the multilayer thin film structure was deposited easily with increasing the thickness of the single layer and decreasing the periodicity. The high-level reflectivity thin film stack as 10(9H9L)9H was designed. By the above method and compared with the classic low-level high reflectivity thin film stack of the same geometric thickness, the numerical simulation and the computational results show that the spatial dispersion is large and the designed multiplayer structure is more feasible in practice for fabrication.
Investigation of Multichannel Spatial Demultiplexer Based on Thickness-Tapered Thin Film Stacks

Xuezheng Sun,Xu Liu,Peifu Gu

DOI: https://doi.org/10.1016/j.optcom.2007.12.034

IF: 2.4

2008-01-01

Optics Communications

Abstract:A conventional high reflectance (HR) coating sandwiched between two thickness-tapered period thin film stacks is investigated to enhance multichannel spatial dispersion, since phase shift on reflection changes rapidly due to the mismatch induced by the overlaps of different reflective bands. Compared with ordinary Bragg reflector, this structure can be more freely to enhance multichannel spatial shift. The design, fabrication and testing results of this special multichannel filter were presented in the paper, and show the potential to act as a novel demultiplexer.
Characteristics of Lcos Phase-Only Spatial Light Modulator and Its Application

HT Dai,YJ Liu,X Wang,KS Xu

DOI: https://doi.org/10.1117/12.521929

2004-01-01

Abstract:Optimize the working model of LCoS (Liquid Crystal on Silicon) in parameter space by simulation. Two models are selected, which is suitable for phase modulating. One is the RTN-52degrees model, the other is parallel alignment ECB model. Phase changing is measured when various voltage are applied to Lcos. Show some results when the Lcos is used as a Fresnel lens.
Design, implementation, and study of the high-resolution high-efficiency liquid crystal on silicon spatial light modulator for the telecommunication application in the short-wave infrared spectral band

Po-Ju Chen,Philip Engel,Grigory Lazarev,Adam Mazur,H. Paul Urbach,Paul Urbach

DOI: https://doi.org/10.1117/12.2506825

2019-03-01

Abstract:There are many important applications for phase-only liquid crystal on Silicon-based spatial light modulators (LCOS SLMs). Among the applications, the diffractive beam splitting, beam shaping and beam steering with LCOS SLM are finding more and more use in telecommunication applications (e.g. wavelength selective switch for ROADM, space and mode division multiplexing). However, many effects of LCOS device have to be considered if we want to get high quality output light field. For example, the ideal phase, intensity and polarization distribution in far field are usually deteriorated by the pixelated metal structure and fringing field effects. Thus, the total efficiency is decreased. By using electro-optical and electromagnetic simulation methods, we can properly incorporate the effects that influence the optical performance of LCOS and optimize the design. Furthermore we report the implementation of the high-performance high-resolution LCOS SLM for the telecommunication C- and L-band with the average insertion loss (IL) of less than 0.2 dB, achieved by the reflectivity-enhancement coating on the LCOS backplane. The experimental results on reflectivity, diffraction efficiency, crosstalk and other important parameters are compared with the theoretical predictions.
Design of precision light intensity modulation for light-addressable potentiometric sensor

WenYan Zhang,Yan Zhao,Da Ha,W. Cai,Pinǵ Wang

DOI: https://doi.org/10.1109/TRANSDUCERS.2011.5969580

2011-01-01

Abstract:In this study, we present a novel design of precision light intensity modulation for LAPS measurement, aim to ameliorating the stability and precision of light source. A superluminescence LED (SLED) module, with a specialized designed SLED driver, is proposed as the light source. This design provides precision sine light intensity output. Furthermore, this design is immune from variation of ambient temperature. Contrast experiments were given between two conditions, with design of precision light intensity modulation and with traditional light source. From contrast experiments, it can be deduced that LAPS system with design of precision light intensity modulation has better linearity and accuracy than the latter one. © 2011 IEEE.
Research on Characteristics of Amplitude Modulation of a Reflective Liquid Crystal on Silicon Device

GE Ai-ming,SUI Zhan,SU Jun-hong

DOI: https://doi.org/10.3321/j.issn:0258-7025.2005.03.012

2005-01-01

Chinese Journal of Lasers

Abstract:The characteristics of amplitude modulation of a reflective liquid crystal on silicon (RLCOS) are discussed in this paper. The 2×2 Jones matrix methods is used to analyze amplitude modulation characteristics. The system is constructed for testing of amplitude and phase, in which He-Ne laser is used as the light source, the wave front amplitude is measured by the interferometer. The RLCOS display device as a mirror is used as a spatial light modulator and its driving circuit is controlled by a computer, digital data are sampled by CCD. The amplitude modulation characteristics of 1024×768 RLCOS display device are gotten. Comparing with the without sharped laser beam profile, the results show that under selected polarization states of input and output, RLCOS displays can be used as amplitude modulator.
Development of Visible-Light Optical Simulator Based on Liquid Crystal on Silicon Technology

Fake Lu,Haifeng Li,Peifu Gu,Xu Liu

DOI: https://doi.org/10.3321/j.issn:0253-2239.2006.05.019

2006-01-01

Abstract:To offer the true to nature target-background images used in the simulation system for homing weapons, a visual-light optical target simulator based on the liquid crystal on silicon (LCOS) technology is established. The typical output images and measurement method and data of the optical parameter are presented. It is proved that the simulator has more appropriate luminance, higher contrast and better uniformity than other conventional ones. Compared with the cathode ray tube (CRT) technology, it avoids the flicker problem and offers steady video outputs, which can greatly improve the seeker's ability of capturing the goal. So the LCOS technology is an ideal choice for optical simulators. Besides, the calculation method of illumination system based on the double fly eye lens is provided and simple results are gained which can also be used in other illumination systems of projection.
Programmable spatial light modulator and its application in fabricating optical components of polymer dispersed liquid crystal

Feng Wang,Haitao Dai,Bing He,Xuecheng Sun,Jianhua Liu,Keshu Xu

2007-01-01

Abstract:A commercialized LcoS panel with the display capacity of 1024 x 768 was adopted to construct a spatial light modulator, which can be easily controlled by computer video signals to generate programmable photomasks. This photomask can be used to make various kinds of optical components based on polymer dispersed liquid crystal (PDLC) materials. A three-level Fresnel zone lens (FZL) of PDLC as an example was fabricated using this programmable photomask, whose diffraction efficiency ( DE) ranged between 61 % and 4 % as the applied electric field was varied. The maximum value of DE was in a good agreement with the theoretical predication for three-level Fresnel zone.
LNoS: Lithium Niobate on Silicon Spatial Light Modulator

Sivan Trajtenberg-Mills,Mohamed ElKabbash,Cole J. Brabec,Christopher L. Panuski,Ian Christen,Dirk Englund

2024-02-22

Abstract:Programmable spatiotemporal control of light is crucial for advancements in optical communications, imaging, and quantum technologies. Commercial spatial light modulators (SLMs) typically have megapixel-scale apertures but are limited to ~kHz operational speeds. Developing a device that controls a similar number of spatial modes at high speeds could potentially transform fields such as imaging through scattering media, quantum computing with cold atoms and ions, and high-speed machine vision, but to date remains an open challenge. In this work we introduce and demonstrate a free-form, resonant electro-optic (EO) modulator with megapixel apertures using CMOS integration. The optical layer features a Lithium Niobate (LN) thin-film integrated with a photonic crystal (PhC), yielding a guided mode resonance (GMR) with a Q-factor>1000, a field overlap coefficient ~90% and a 1.6 GHz 3-dB modulation bandwidth (detector limited). To realize a free-form and scalable SLM, we fabricate the PhC via interference lithography and develop a procedure to bond the device to a megapixel CMOS backplane. We identify limitations in existing EO materials and CMOS backplanes that must be overcome to simultaneously achieve megapixel-scale, GHz-rate operation. The `LN on Silicon' (LNoS) architecture we present is a blueprint towards realizing such devices.

Optics,Applied Physics,Instrumentation and Detectors
Wavelength Tunable Laser Based on Distributed Reflectors with Deep Submicron Slots

Li Zou,Lei Wang,Tingting Yu,Jian-Jun He

DOI: https://doi.org/10.1117/12.2001584

2012-01-01

Abstract:To reduce the cost of wavelength tunable lasers, the structure and fabrication methods of a wavelength tunable laser based on distributed reflectors with deep-submicron slots are proposed. By using a pillar reversing technique, the device is fabricated with standard UV lithography. The features and benefits of reflectors with deep-submicron slots are simulated and explained. As high as 47dB side mode suppression ratio and 50nm tuning range around 1550nm is achieved.
A Method for Linearization of Phase Response Generated in Liquid Crystal Modulator

Yu-bo LI,Wen-jian JIA,Yu-xiao ZENG,Li CHEN,Jian-yi YANG,Ming-hua WANG

DOI: https://doi.org/10.3969/j.issn.1003-501X-2009-07-025

2009-01-01

Abstract:It is necessary to study and improve the modulation characteristics of Liquid Crystal Modulator (LCM) because of its wide application. A logarithm driving signal model is proposed to linearize the phase response of LCM between 0 and π. Furthermore, it is found out in the experiments that the degree of phase response linearization of liquid crystal modulator decreases with driving frequency increasing. To overcome this problem, this paper presents mapping the nonlinear phase response to linear one when LCM is driven by a periodic signal constructed of the logarithm model. The experimental results indicate that it is feasible to obtain the linear phase response between 0 and π.
Linearization of periodic phase response for Liquid crystal modulator

WenJian Jia,Yubo Li,Li Chen,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.802607

2008-01-01

Abstract:Liquid crystal modulator(LCM) is now widely applied, especially in optical telecommunication networks. However, according to the electro-optic characteristic of liquid crystal, we will obtain nonlinear phase response when LCM is driven by the voltage varying with time linearly(v=kt+v0). And in practical application this nonlinear phase response will affect the modulation precision, communication modulation efficiency and so on. This paper presents a logarithm driving signal model to linearize the nonlinear phase response of LCM between 0 and π. When driven by a periodic signal whose voltage varies from 2.0 to 10.7V in the way of logarithm in every periods, the LCM's phase response hops in the point of intersection of two voltage periods. Therefore, we advance another periodic logarithm driving signal, whose voltage ascends from 2.0 to 10.7V in first half periods and descends from 10.7 to 2.0V in the other half periods. Furthermore, We find that the degree of phase response linearization of LCM decreases with the frequency of driving signal increasing. This paper proposes mapping the nonlinear phase response to linear one to overcome this problem. The experimental results indicate that obtaining the linear phase response of liquid crystal between 0 and π with different-frequency driving signals is feasible. © 2008 SPIE.
High Precision Optical Wavefront Generation Using Liquid Crystal Spatial Light Modulator (LC-SLM)

Zixin Zhao

DOI: https://doi.org/10.5772/intechopen.100379

2021-10-12

Abstract:LC-SLM provides a flexible way to modulate the phase of light with the help of a grayscale pattern loaded on it. Nevertheless, the modulated phase profile is of relatively low accuracy due to the nonlinear and nonuniform response of the liquid crystal layer in the SLM. To improve the performance of LC-SLM on the wavefront generation, the nonlinear and nonuniform phase response needs to be calibrated and compensated effectively. In this chapter, we present some state-of-art methods to measure the phase modulation curve of the LC-SLM. Some methods to measure the static aberration caused by the backplane of the LC-SLM are then presented. Last but not the least, the future development of the LC-SLM in phase modulation is also presented.
Design And Simulation Of Double Annular Illumination Mode For Micro-Lithography

Qiang Song,Jing Zhu,Baoxi Yang,Lei Liu,Jun Wang,Huijie Huang

DOI: https://doi.org/10.1117/12.2031650

2013-01-01

Abstract:Methods of generating various illumination patterns remain as an attractive and important micro-optics research area for the development of resolution enhancement in advanced lithography system. In the current illumination system of lithography machine, off-axis illumination is widely used as an effective approach to enhance the resolution and increase the depth of focus (DOF). This paper proposes a novel illumination mode generation unit, which transform conventional mode to double annular shaped radial polarized (DARP) mode for improving the resolution of micro-lithography. Through LightTools (TM) software simulation, double annular shaped mode is obtained from the proposed generation unit. The mathematical expressions of the radius variation of inner and outer rings are deduced. The impacts of conventional and dual concentric annular illumination pattern on critical dimension uniformity were simulated on an isolated line, square hole and corner. Lithography performance was compared between DARP illumination mode and corresponding single annular modes under critical dimension of 45nm. As a result, DARP illumination mode can improve the uniformity of aerial image at 45nm node through pitch varied in 300-500 nm to a certain extent.
Design of Self-Matching Photonic Lantern for High-Order Transverse-Mode Laser Systems

Li Zhao,Wei Li,Yunhao Chen,Enming Zhao,Jianing Tang

DOI: https://doi.org/10.3390/photonics11030208

IF: 2.536

2024-02-27

Photonics

Abstract:High-order transverse-mode lasers have important potential application value in many fields. To address the current issue of the limited controllability of modes in high-order transverse-mode lasers, we have designed a self-matching photonic lantern (SMPL). The SMPL is formed by introducing a few-mode fiber into the input fiber array of the traditional photonic lantern. The parameters of the few-mode fiber match those of the tapered few-mode port of the SMPL; thus, it can transmit high-order modes in a closed loop. The designed SMPL exhibits dual-band multiplexing characteristics at 980/1550 nm, manifesting specifically as high-order mode selectivity excitation at 980 nm and mode preservation at 1550 nm. These characteristics have been validated through simulation and preliminary experiments. The SMPL is designed for constructing all few-mode fiber ring cavity lasers, enabling the pumping of the 980 nm fundamental mode to high-order modes and the transmission of multiple high-order transverse-mode lasers at 1550 nm in a closed loop. The proposed SMPL extends the configuration and functionality of the photonic lantern family, offering a flexible and effective approach to facilitate the generation of multiple high-order transverse-mode lasers. The SMPL combined with fiber laser systems could effectively broaden communication channels and enhance communication bandwidth. It also holds significant value in optical sensing, high-resolution imaging, laser micro-processing, and other fields.

optics
The Fabrication and Application of A Novel Oaslm Based on A-Si:H and Its Alloy

XF Gu,JF Du,XF Huang,J Zhou,W Li,WQ Gao,KJ Chen

DOI: https://doi.org/10.1016/0022-3093(96)00108-1

IF: 4.458

1996-01-01

Journal of Non-Crystalline Solids

Abstract:The fabrication and operation of an optically addressed spatial light modulator (OASLM), consisting of a hydrogenated amorphous silicon (a-Si:H) p-i-n photodiode as the photosensor, a twisted nematic liquid crystal as the electro-optical modulating material and a hydrogenated amorphous silicon germanium layer (a-SiGex:H) as the light blocking material are described. The a-Si:H p-i-n diode and a-SiGex:H are deposited continuously in one reactant chamber by means of plasma enhanced chemical vapor deposition (CVD) methods with a shutter. The electric and optical characteristics were measured. Under a 300 lux illumination of white light, the OASLM exhibits a resolution of at least 20 line pairs/mm and a contrast ratio of more than 25:1. The writing sensitivity is about 3 lux. Finally, an attempt is made to realize optical logical processes using our OASLM. In one experimental system, sixteen real-time optical logical operations of two binary-state images are achieved.
Design of high-speed phase-only spatial light modulators with two-dimensional tunable microcavity arrays

Cheng Peng,Ryan Hamerly,Mohammad Soltani,Dirk R Englund

DOI: https://doi.org/10.1364/OE.27.030669

2019-10-14

Abstract:Spatial light modulators (SLMs) are central to numerous applications ranging from high-speed displays to adaptive optics, structured illumination microscopy, and holography. After decades of advances, SLM arrays based on liquid crystals can now reach large pixel counts exceeding 106 with phase-only modulation with a pixel pitch of less than 10 µm and reflectance around 75%. However, the rather slow modulation speed in such SLMs (below hundreds of Hz) presents limitations for many applications. Here we propose an SLM architecture that can achieve two-dimensional phase-only modulation at high speed in excess of GHz. The architecture consists of a tunable two-dimensional array of vertically oriented, one-sided microcavities that are tuned through an electro-optic material such as barium titanate (BTO). We calculate that the optimized microcavity design achieves a π phase shift under an applied bias voltage below 10 V, while maintaining nearly constant reflection amplitude. As two model applications, we consider high-speed 2D beam steering as well as beam forming. The outlined design methodology could also benefit future design of spatial light modulators with other specifications (for example amplitude modulators). This high-speed SLM architecture promises a wide range of new applications ranging from fully tunable metasurfaces to optical computing accelerators, high-speed interconnects, true 2D phased array beam steering, and quantum computing with cold atom arrays.
Tunable Reflective Lens Array Based on Liquid Crystal on Silicon.

X Wang,HT Dai,KH Xu

DOI: https://doi.org/10.1364/opex.13.000352

IF: 3.8

2005-01-01

Optics Express

Abstract:We use a phase modulation method to form tunable lens arrays on liquid crystal on silicon (LCOS). With independent voltage adjustment on each pixel, LCOS generates a high-resolution gradual phase modulation profile, which makes it possible for the lens array to be freely tunable in focal length and other parameters. A tunable lens array is made on LCOS by use of this method, and we provide details of the theoretical analyses and experimental results.
A review of liquid crystal spatial light modulators: devices and applications

Yiqian Yang,Andrew Forbes,Liangcai Cao

DOI: https://doi.org/10.29026/oes.2023.230026

2023-01-01

Opto-Electronic Science

Abstract:Spatial light modulators, as dynamic flat-panel optical devices, have witnessed rapid development over the past two decades, concomitant with the advancements in micro-and opto-electronic integration technology. In particular, liquid-crystal spatial light modulator(LC-SLM) technologies have been regarded as versatile tools for generating arbitrary optical fields and tailoring all degrees of freedom beyond just phase and amplitude. These devices have gained significant interest in the nascent field of structured light in space and time, facilitated by their ease of use and real-time light manipulation, fueling both fundamental research and practical applications. Here we provide an overview of the key working principles of LC-SLMs and review the significant progress made to date in their deployment for various applications, covering topics as diverse as beam shaping and steering, holography, optical trapping and tweezers, measurement, wavefront coding, optical vortex, and quantum optics. Finally, we conclude with an outlook on the potential opportunities and technical challenges in this rapidly developing field.
Liquid Crystal Spatial Light Modulator Using Amorphous Silicon Photoconductor

Peng Song,Qihong Wu,Jinfa Tang

DOI: https://doi.org/10.1117/12.962258

1990-01-01

Abstract:The development of a reflection mode nematic field effect a Ã¢â‚¬â€? Si:H LCLV is described. The amor-phous silicon photoconductor layer is deposited by glow discharge without doping. The configuration al-so consists of dielectric mirror as CdS LCLVs do. The bias frequency is in the range of 500Hz to 10KHz. MTF, sensitivity and time response of the device are measured. High resolution of > 501p/mm and switching time less than 25ms are achieved. Also reported is an equivalent circuit mode which has been compared with experimental results.

Design and Application of Reflective Lcos Based Amplitude Spatial Light Modulators

Design of High-Level Reflectivity Thin Film Spatial Demultiplexer

Investigation of Multichannel Spatial Demultiplexer Based on Thickness-Tapered Thin Film Stacks

Characteristics of Lcos Phase-Only Spatial Light Modulator and Its Application

Design, implementation, and study of the high-resolution high-efficiency liquid crystal on silicon spatial light modulator for the telecommunication application in the short-wave infrared spectral band

Design of precision light intensity modulation for light-addressable potentiometric sensor

Research on Characteristics of Amplitude Modulation of a Reflective Liquid Crystal on Silicon Device

Development of Visible-Light Optical Simulator Based on Liquid Crystal on Silicon Technology

Programmable spatial light modulator and its application in fabricating optical components of polymer dispersed liquid crystal

LNoS: Lithium Niobate on Silicon Spatial Light Modulator

Wavelength Tunable Laser Based on Distributed Reflectors with Deep Submicron Slots

A Method for Linearization of Phase Response Generated in Liquid Crystal Modulator

Linearization of periodic phase response for Liquid crystal modulator

High Precision Optical Wavefront Generation Using Liquid Crystal Spatial Light Modulator (LC-SLM)

Design And Simulation Of Double Annular Illumination Mode For Micro-Lithography

Design of Self-Matching Photonic Lantern for High-Order Transverse-Mode Laser Systems

The Fabrication and Application of A Novel Oaslm Based on A-Si:H and Its Alloy

Design of high-speed phase-only spatial light modulators with two-dimensional tunable microcavity arrays

Tunable Reflective Lens Array Based on Liquid Crystal on Silicon.

A review of liquid crystal spatial light modulators: devices and applications

Liquid Crystal Spatial Light Modulator Using Amorphous Silicon Photoconductor