High-order Combined Geometric-Chromatic Aberrations of Magnetic Electron Lenses Using Differential Algebra

M Cheng,TT Tang,ZH Yao
DOI: https://doi.org/10.1088/0022-3727/35/4/318
2002-01-01
Journal of Physics D Applied Physics
Abstract:In this paper, high-order geometric and chromatic aberrations of magnetic electron lenses are dealt with together by using the differential algebraic method. High-order geometric-chromatic aberration analytic expressions are obtained and arbitrary order combined aberrations can be calculated. As an example, a Glaser's bell-shaped magnetic electron lens has been studied and the second- and third-order combined geometric-chromatic aberration coefficients have been calculated. The aberration figures of the combined second-order aberrations are also presented. This developed method can be of great utility in high-order combined aberration analysis and correction for high-resolution charged particle optical systems.
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