Improved Genetic Algorithm for Semiconductor Device Comprehensive System

谢晓锋,张文俊,杨之廉
DOI: https://doi.org/10.3321/j.issn:0372-2112.2002.02.009
2002-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:The genetic algorithm, called GENOCOP, used in the semiconductor device comprehensive system is improved. The real-valued design space is transformed into integer-valued design space according to the effects of the technical precision of the processing parameters. An adaptive combined operator is introduced to extend and exploit the quasi-feasible space by utilizing the searched points. While keeping the advantage to find the solutions, the coverage of the solution space is improved (about 2.87 times) with same setting. This will help the designers to design workable device more efficiently.
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