Abstract:Extreme ultraviolet (EUV) light source is an important part of EUV lithography system in semiconductor manufacturing. The EUV light source requires that the 4p 6 4d n -4p 5 4d n +1 + 4d n -1 4f transitions of Sn 8+~13+ ions emit thousands of lines which form unresolved transition arrays near 13.5 nm. Laser-induced discharge plasma is one of the important technical means to excite target into an appropriate plasma condition. Laser-induced discharge plasma has a simple structure and a low cost. It also has important applications in mask inspection, microscopic imaging, and spectral metrology. In the design and production process, there are many factors that can influence the conversion efficiency, such as current, electrode shape, and laser power density. The simulation method is a convenient way to provide guidance for optimizing the parameters. In this paper, a completed radiation magneto-hydrodynamic model is used to explore the dynamic characteristics of laser-induced discharge plasma and its EUV radiation characteristics. To improve the accuracy, a more detailed global equation of state model, an atomic structure calculation model including relativistic effect and a collision radiation model are proposed simultaneously. The simulation reconstructs the discharge process effectively, which is divided into five stages in the first half cycle of current, including expansion of laser plasma, column formation of discharge plasma, diffusion of discharge plasma, contraction of discharge plasma, and re-diffusion of discharge plasma. It is revealed that the pinch effect during the current rising time exerts a significant influence on the generation of EUV radiation. The conversion efficiency of EUV radiation is still low under our existing conditions, and hopefully a higher rising rate of current can improve the conversion efficiency in the future work.

Particle Simulation Research on the Detailed Process of Bubble Generation

High Quality Electron Bunch Generation with CO2-laser-plasma Interaction

Intense Laser Beam Guiding in Self-Induced Electron Cavitation Channel in Underdense Plasmas

Model Study on Laser Interaction with Near-Critical Density Plasma

Study on the Effects of Ion Motion on Laser-Induced Plasma Wakes

Phase-dependent bubble hosing and resonant amplification of betatron oscillation in few-cycle laser wakefield accelerator

Plasma-based identification of gases in a laser-induced cavitation bubble

Measuring formation of a vapor bubble around a heated nanoparticle and size of nanoparticles by holography

Sub-megahertz nucleation of plasmonic vapor microbubbles by asymmetric collapse

Long-Pulse Laser-Induced Cavitation: A Race Between Advection and Phase Transition

Overcritical Electron Acceleration and Betatron Radiation in the Bubble-Like Structure Formed by Re-Injected Electrons in a Tailored Transverse Plasma

Comprehensive analysis of spherical bubble oscillations and shock wave emission in laser-induced cavitation

Terahertz Radiation Generated by Shell Electrons in the Bubble Regime Via the Interaction Between an Intense Laser and Underdense Plasma

Simulation of Electron Beam Instabilities in Collisionless Plasmas

On the generation of ultra-bright and low energy spread electron beams in laser wakefield acceleration in a uniform plasma

Submegahertz Nucleation of Plasmonic Vapor Microbubbles near a Solid Vertical Boundary

Generation of Ultrabright and Low Energy Spread Electron Beams in Laser Wakefield Acceleration in a Uniform Plasma

Parametric amplification of betatron oscillation by bubble breathing in laser wakefield accelerator

Relativistic Electron Heating in Laser-Produced Plasmas

Simulation of extreme ultraviolet radiation of laser induced discharge plasma

Control of Electron Beam Polarization in the Bubble Regime of Laser-Wakefield Acceleration