Novel Mlaps Using the Multilight and Digital Compensation Technique

GY Zhang,P Wang,JH Han,DF Cui
DOI: https://doi.org/10.1117/12.440197
2001-01-01
Abstract:This paper proposed a novel application of the multi Light-Addressable Potential Sensor (m-LAPS) for multi-parameters and biochemical imaging detection which advantage was its short time to take an multi-parameters and image of the surface potential distribution along its surface. By illuminating the LAPS simultaneously at several positions, of which each was illuminated with a light pointer modulated with a different frequency, the surface potential at all illuminated regions can be measured simultaneously by analyzing the resulting photocurrent. By using this method, the rate to obtain a complete image of the surface potential distribution across a LAPS wafer can be drastically increased compared to the conventional mode, in which images were obtained by scanning the surface with one single light pointer. According to the results obtained in this report, the mLAPS should be an interesting and realizable device.
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