Periodic Structure and Quantum Size Effect of μc-Si∶H/a-Si∶H Multilayers

Ming XU,Hong-tao WANG,Liang-Huan FENG,Xin-ming ZHOU,Ya-Ping CAI,Ji-wen FENG,Ning XU,Zhen-Hong MAI

DOI: https://doi.org/10.3321/j.issn:0253-4177.2001.04.010

2001-01-01

Chinese Journal of Semiconductors

Abstract:μc-Si∶H/a-Si∶H multilayers have been prepared with RF glow-discharge method in which two types of coupling electrodes are alternately changed periodically.The perfect periodic structure of the samples is determined by low-angle X-ray diffraction.The optical properties and temperature dependence on conductivity of the multilayers were observed.It is found that,as the thickness of a-Si∶H sublayer decreases,the optical gap of multilayer increases and the activation energy of conductivity decreases in low temperatures.Above results have been discussed.